JPS642441U - - Google Patents
Info
- Publication number
- JPS642441U JPS642441U JP9531287U JP9531287U JPS642441U JP S642441 U JPS642441 U JP S642441U JP 9531287 U JP9531287 U JP 9531287U JP 9531287 U JP9531287 U JP 9531287U JP S642441 U JPS642441 U JP S642441U
- Authority
- JP
- Japan
- Prior art keywords
- chip
- suction
- pick
- tube
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9531287U JPS642441U (en]) | 1987-06-23 | 1987-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9531287U JPS642441U (en]) | 1987-06-23 | 1987-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642441U true JPS642441U (en]) | 1989-01-09 |
Family
ID=31319969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9531287U Pending JPS642441U (en]) | 1987-06-23 | 1987-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642441U (en]) |
-
1987
- 1987-06-23 JP JP9531287U patent/JPS642441U/ja active Pending
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